CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. FPA-3000 EX5 DUV Stepper: Res: 0. ・既に市場で高い信頼性を実証しているFPA-3030プラットフォームを採用. 99 Canon online store value. 実績のあるi線ステッパー「FPA-3030i5+」と共通のウエハー搬送システムを搭載し、IoT関連デバイスやパワーデバイスの製造に用いられるさまざまな材質、径、厚さの基板の搬送に対応します。 CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. Size 4” thru. Size 4” thru 8” SEMI Standard, JEIDA, Notch / Flat. Recently Sold Equipment. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. Alternate Part# BH8-1532. For sale: CANON FPA-3000 iW Fine Pattern Aligner. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; This product is located at our USA - East Coast HQ facility. CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. This Canon i5++ Stepper is being offered fully refurbished with installation and 3 months parts and labor warranty worldwide. Other machines similar to Canon FPA-3000 EX5 DUV. FPA-5550iX. . 基本情報. Canon Stepper FPA 3000 Series i4, iW, MR, i5,i5+, i5++ ( 365nm i-line) Canon Stepper FPA 3000 Series EX3,EX3L, EX4,EX5,EX6 ( 248nm DUV) Canon Scanner FPA 4000 Series ES1 ( 248nm DUV) Canon Scanner FPA 5000 Series ES2, ES2+,ES3,ES4,ES5, ( 248nm DUV) Canon Scanner FPA 5000 Series AS1,AS2,AS3 ( 193nm DUV) Canon. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5 Stepper ; CANON FPA-3000 i5+ Stepper; CANON FPA. Comments. FPA-3000 I5++ (for CANON) and others 2700W MERCURY SHORT ARC DOUBLE FPA3000 DC. 58 shipping. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. 8µm resolution accuracy and can expose four 22mm FPA-3000i4/i5/EX3 die areas in a single shot. 66. Comments. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA. Wafer: 1. Quantity: 0. BG4-2035 IPIF-III . FPA-3030i5a. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. Exposure Light: 365nm. 350nm以下の解像力が、様々な分野のデバイス量産をサポート。. Canon FPA 3000 series extended reticle library extended reticle library available for Sale by SDI Group. 1/1. This cutting-edge machine uses a unique, innovative technology called Improved Resolution Image Metrology (IRIM) that provides a 25% improvement in optical performance compared to other wafer steppers. Full operational demo for buy off at our facility. 2001: Quantity: 1: Sales Condition:. Item id:34368, model FPA 3000 I5 + manufactured by CanonInterface Unit (IRA) for Canon FPA-3000 i5 stepper including one multi-buffer unit and Wafer edge exposure (WEE) Chemical Cabinet 1 a) Pressurized tank for HMDS b) Buffer tank for thinner, 3 liter (qty 2) c) Buffer tank for developer, 3 liter (qty 2) Chemical Cabinet 2CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. Recently Sold Equipment. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. Fully Tested on our FPA-3000 Steppers. Pounds (lbs): 11. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. 45 - . Quantity: 0. CONTROLLER 3 PCB . CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5 Stepper ; CANON FPA-3000 i5+ Stepper; CANON FPA. CAP3 PCB . Achieve superior chip quality and high resolution with Canon's innovative technology. 4. Wide-Field / High Resolution i-line Stepper. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5 Stepper ; CANON FPA-3000 i5+ Stepper; CANON FPA-3000 i5++ Stepper; CANON FPA-3000 iW. Related Equipment For Sale. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5 Stepper ; CANON FPA-3000 i5+ Stepper; CANON FPA. Semiconductor Specifications. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. 610-04 i5 Standard Test Reticle: BG3-4062-000: Laser Head Unit: BG4-3329-000: Ring Chuck:. Canon Stepper MPA-500FAb. Quantity: 0. $ 20 M + Sales Revenue. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5 Stepper ; CANON FPA-3000 i5+ Stepper; CANON FPA-3000. With an 800mm x 800mm field size, CANON FPA 3000I5 is an advanced optical imaging. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. 0. This in turn enables mass production of large and dense packaging with fine circuit patterns that integrate 2. 1 2. 02. Pellicle Frame Pattern Side Only : Wafer: 1. SDL Atlas M238BB Electronic Crockmeter / Rubbing Fastenss Tester. Canon manufactured i-line steppers (FPA-3000i4, i5, i5+) and KrF steppers (FPA-3000EX4, EX5, EX6) in the 1990s that were widely used in 8-inch System on Chip (SoC) and DRAM production lines. Suitable for: FPA-3000 EX3 DUV Stepper, FPA-3000 EX4 DUV Stepper, FPA-3000 EX6 DUV Stepper, FPA-3000 i4 Stepper, FPA-3000 i5 Stepper, FPA-3000 i5 Stepper, FPA-3000 i5+ Stepper, FPA-3000 i5++ Stepper, FPA-3000 iW Stepper, FPA-3000 MR Stepper. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold EquipmentTable of Contents 3 25 Optoelectronics 25 Motion Control Products 26 3-D Machine Vision System (RV-Series) 26 Surface Reflectance Analyzer 16 Canon ANELVA Product Application Table 17 BC7000 Atomic Diffusion Bonding Equipment 18 Semiconductor Manufacturing Equipment 20 Storage and Hard Disk Drive Manufacturing Equipment 21. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepperModel: FPA 3000 MR First year available: 1996 Lens Type: UL51 Stage Type: ABS (Air Guided Bearing) Chamber Type: CD80 Projection Optics: Projection Magnification: 1/2 X Exposure Light: 365nm Numerical Aperture: 0. Exposure Light Kr F (365nm) Illumination: 1. FPA-3030i5+. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. Pattern Material 2 layer Cr, 3 layer Cr. キヤノンは、半導体露光装置の新製品として、化合物半導体などのデバイス製造に対応し、半導体製造に必要な総コストの指標であるCoOを低減したi線 ※1 ステッパー“FPA-3030i5a”を2021年3月上旬に発売します。. Intertec provide turnkey solution for below model equipment including refurbishment, modification, installation and warranty service. Alternate Part No : Y60-1348-000. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold EquipmentCanon Stepper FPA-3000 EX5 . CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; This product is located at our USA - East Coast HQ facility. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; This product is located at our USA - East Coast HQ facility. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5 Stepper ; CANON FPA-3000 i5+ Stepper; CANON FPA. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. 35 μm resolution, then highest in the world — led to the FPA-3030i5+ system currently on sale. Comments. Canon FPA3000, FPA2000, and BH8 wafer steppers for sale. Offer not valid on bulk orders. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. LD/PD board for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 LD/PD board suitable for Canon FPA3000 series (P/N BH8-1818-01, BG4-6789) 53056 BG9-4757, BH8--1069-01 AF DRV board for Canon FPA 1550 series AF driver board from Canon 1550 MarkIV series 53057 BG9-4760, BG83111, BH8-1071-02CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. 25GHz-29. QuoteCANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepperOffer valid only on products available for sale through the Canon online store only. Compact Flash (CF) for the Canon FPA-3000 Series Stepper: Sales: Workstation 712/100 with iW HDD: Sales: Wafer Chuck, Ring Type, 6" Sales: Wafer Chuck, Ring Type, 8" Sales:. SDI ID: 98097; Manufacturer: Canon: Model: FPA-5500iZ: Description: I-Line Stepper: Version: 300 mm: Vintage: 31. Comments. CCD OPTF SENSOR PCB. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. The FPA-3030i5a employs an off-axis alignment scope that measures wafer alignment marks through an optical path that does not pass through the projection lens, which can use a wide range of alignment illumination wavelengths. Item id:34368, model FPA 3000 I5 + manufactured by CanonOfficial MapQuest website, find driving directions, maps, live traffic updates and road conditions. Thanks to a wide exposure field of. PLEASE CALL OR. 1999: 1: as is where is: immediately: 53050: Canon: BH8-1818-01: LD/PD board for Canon FPA 3000 series iw. a positive photoresist (PR) layer, exposed to I-line stepper (Canon FPA-3000 i5+) through a mask, and then developed in regular sequence. 実績のあるi線ステッパー「FPA-3030i5+」と共通のウエハー搬送システムを搭載し、IoT関連デバイスやパワーデバイスの製造に用いられるさまざまな材質. Comments. The FPA-5550iZ2 offers a balance between productivity and alignment. 07. 0KW. Size 6" square t=0. FPA-5550iZ2. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. 13 Years. Related Equipment For Sale. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. Offer subject to the Canon Terms of. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. Comments. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. With an 800mm x 800mm field size, CANON FPA 3000I5 is an advanced optical imaging equipment capable of producing high-precision patterning of up to 80nm resolution. 63を実現した1:5縮小倍率投影レンズを搭載しているi 線ステッパー。. 8µm resolution and 4-shot exposure with minimal distortion to make possible a wide 100×100mm exposure field. Description: HL(S) IF PCB ASS'Y. Quote. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. Alternate Part No : BG4-6794-U00. 1999: 2: as is where is: immediately: 52366: Canon: Shimaden SR25-2P-N-00699609: PDI CONTROLLER for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6: spares: 30. CANON Spare Parts for Sale. FPA-3030i5a. Light Source 2. Company introduces: Siltronic is a global leader in the market for hyper pure silicon wafers and serve almost all of the leading semiconductor silicon wafer consumers. Wide Format Print Wide Format Print Wide Format Print. 22um, Align: 40nm, Field: 22mm: 1: FPA-3000 i4 Stepper:CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. We are also offering TEL ACT 8, Single Block, i-line, Coater/Developer from our stock. CANON BG4-7266-000 For Sale. Field size is 22mm x 22mm. Comments. ・50mm（2inch）～ 200mm（8inch）の幅広いウエハーサイズ対応. Integrates other FPA-3000 tools for optimum mix and match lithography. Related Equipment For Sale. Comments Related Equipment For Sale. 1/3. Recently Sold Equipment. In Stock, Ready to Ship. Popular Product. Canon Stepper FPA-3000 i5. Canon Stepper FPA-3000 iW Stepper . Now, you have the option to work with New Way and an authorized rebuilder, in concert with Canon themselves to retrofit your system with self cleaning Porous Media air bearings. ・チャンバーの温度制御方式を変更したことで、消費電力を従来. Explore!TOKYO, October 31, 2023—Canon Inc. Reticle: 1. Configured to support optional equipment, the stepper can accommodate specialist wafer materials, including silicon and sapphire. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. Our custom flat air bearings are compatible with Canon FPA I4, IW or I5 models from 1995 through 1999, providing up to an 80% cost savings versus purchasing directly. Field Size 22x22 17x26. amcoss parts for Canon FPA 3000 i4/i5 AA/FRA optics. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. 0KW Super High Pressure Hg Lamp. Size 6" square t=0. CANON FPA-2000 i1 WAFER STEPPER COM-RL PCB P/N BG4-2420 / BG8-2356 BH8-1192-01 USED, UNTESTED QUOTED SHIPPING PRICE IS FOR LOWER 48 US STATES ONLY I. used. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. Orders will be shipped to a street address in the 50 United States or the District of Columbia only. AC/DC Power Supply (E-Box) Related Equipment For Sale. Comments. Orders will be shipped to a street address in the 50 United States or the District of Columbia only. 5GHz RF Converter. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. Suitable for: FPA-3000 EX3 DUV Stepper, FPA-3000 EX4 DUV Stepper, FPA-3000 EX6 DUV Stepper, FPA-3000 i4 Stepper, FPA-3000 i5 Stepper, FPA-3000 i5 Stepper, FPA-3000 i5+ Stepper, FPA-3000 i5++ Stepper, FPA-3000 iW Stepper, FPA-3000 MR Stepper. Order Now 250-478-2121; Home; Menu; Specials; Contact UsCANON FPA-3000 i5 Stepper For Sale. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold EquipmentCANON FPA 3000 i5 Wafer Stepper is an advanced lithographic equipment with a powerful variable NA projection lens and HDR imaging, offering high-precision masks with up to 125nm resolution, multi-directional alignment, focus controller and automation capabilities for complex circuit layouts. Description: HeNe Laser Unit. The FPA-5550iZ2 offers a balance between productivity and alignment. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepperCANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. CANON FPA 3000 i5+ is a wafer stepper designed to provide high-precision exposure at 5 nanometer resolution, with an industry-leading alignment accuracy of 3 microns or less and an average production rate of 166 wafers per hour, suitable for a variety of optoelectronic production applications. Main processes are wafering, polishing and finishing. Canon; KLA Tencor;. Global Capital Equipment Market Equipment for Semiconductor Manufacturing +1-856-401-8900; [email protected] Aperture . Serial No: Available upon request. Comments. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5 Stepper ; CANON FPA-3000 i5+ Stepper; CANON FPA. This system was de-installed in working, operational condition. Canon has achieved the *highest level of productivity (throughput) among all equivalent class i-line Lithography Equipment. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. Recently Sold Equipment. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. 2005: Quantity: 1: Sales Condition:. Canon FPA-6000 ES5 Details. Comments. CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; This product is located at our USA - East Coast HQ facility. CANON FPA 3000 i5 is a high-performance, optical processor used to produce large-scale integrated circuits. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. This ensures a consistently high exposure accuracy and ensures a high degree of. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5 Stepper ; CANON FPA-3000 i5+ Stepper; CANON FPA. BG4-4276-000 TV CPU. PDI CONTROLLER for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6: spares: 30. amcoss parts in Nikon Body i8 – i12 optics. Model type: i-Line (365nm) Stepper Wafer size: 200mm; 150mm. 0mm Standard Illumination: Exposure Light: i-Line Light Source: 2. Experience increased productivity and alignment accuracy with the FPA 2500 i3. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. FPA-3030i5+. Field Size: 22 X 22 mm. GCE offers service and support for the following legacy Canon Steppers: FPA 3000 i4, i5, i5+, iW, MR : I-line steppers FPA 3000 EX3, EX4, EX5, EX6 : DUV steppers. W, DNS 60A/80A Spin Tracks (Coaters and Developer), DNS scrubber, SVG 90, 90S, 90SE, SVG 200APS, Procell and SVG Polyimide. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; This product is located at our USA - East Coast HQ facility. Recently Sold Equipment. 4. Released in 1994, the first FPA-3000 series supported the golden age of semiconductors in Japan. 06. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepperCANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. Comments. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. FPA-5550iZ2 Steppers also support growing demand for Internet-of-Things (IoT) device fabrication on both 200 and 300 mm wafers. 99 Canon online store value. 【プレスリリース】発表日:2020年10月27日小型基板向け半導体露光装置"FPA-3030i5a"を発売多様な半導体デバイス製造とCoO（Cost of Ownership）の低減を. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5 Stepper ; CANON FPA-3000. Suitable for: FPA-3000 EX3 DUV Stepper, FPA-3000 EX4 DUV Stepper, FPA-3000 EX6 DUV Stepper, FPA-3000 i4 Stepper, FPA-3000 i5 Stepper, FPA-3000 i5 Stepper, FPA-3000 i5+ Stepper, FPA-3000 i5++ Stepper, FPA-3000 iW Stepper, FPA-3000 MR Stepper. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. com; Equipment; Parts. Related Equipment For Sale. mle-if pcb ass’y i5+ quote. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepperConfiguration: Canon Part# Y60-1095-R00 XY wafer stage, Fully refurbished. Canon FPA-6000 ES6 Details. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. 15. 1/1. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. contact. CANON FPA 3000 i5+ is a high-precision, automated production-level wafer stepper designed for advanced semiconductor fabrication applications, featuring an imaging unit for 0. CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. FPA-5550iZ2 steppers optimize alignment, exposure & wafer transfer sequences, shorten wafer lot exchange times. Model: FPA 3000 EX3 First year available: 1996 Lens Type: ULEX 23 Stage Type: ABS (Air Guided Bearing) Chamber Type: CD90. General Specification and Information: Model: FPA 3000 i5++ First year available: 1999 Lens Type: UL34II Stage Type: FLAT Chamber Type: CD 83 Projection Optics:. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepperCANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. Quote. CANON FPA 3000 i5 is a high-performance wafer stepper designed for the most advanced semiconductor applications. Wide range With extensive domestic and international experience, SERVTECH is a world leader in sales, service, training and support for pre-owned or used Canon Steppers, including the Canon FPA-3000 i4, iW, i5, i5+, i5++ and FPA 3000 EX3, EX4, EX5, EX6 series Steppers. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. Description: 6” Reticle Standard Barcode Reader. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold EquipmentCANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; This product is located at our USA - East Coast HQ facility. 310-0 i5 Standard Test Reticle: BG3-3368-000: 6" No. 特長 1．高い生産性の実現. Also known by alternate Part#(s): BG4-7937. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. CANON FPA 3000 i5 is an advanced optical imaging equipment featuring an 800mm x 800mm field size, Installed Source Deuterium (ISDe) laser source, enhanced series mask changer, motorized positioner (MP-1400), 4K fps imaging performance, high-resolution 2MP monitor and custom-developed control software, capable of producing high-precision patterning of up to 80nm resolution for advanced. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepperCANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; This product is located at our USA - East Coast HQ facility. Recently Sold Equipment. IV. 【プレスリリース】発表日:2020年10月27日小型基板向け半導体露光装置"FPA-3030i5a"を発売多様な半導体デバイス製造とCoO（Cost of Ownership）の低減を. Canon FPA 3000 I5 + i-line Stepper available for Sale by SDI Group. Turn-key Stepper/Track package can. Size 4” thru 8” SEMI Standard, JEIDA, Notch / Flat : Projection Optics:CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. FPA-3030i5a. CANON FPA 3000 i5 Wafer Stepper is a precision alignment equipment designed to increase throughput and accuracy in lithography processes, featuring an array of optical and mechanical features, and advanced. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper;. Standard Illumination: Exposure Light: DUV (Deep Ultra Violet CANON FPA 3000 i5 is a state-of-the-art lithography system that is capable of imaging patterns at resolutions below 100nm and with ultra-high accuracy. PPC PCB . 22 mm has been used at Skyworks with Canon FPA-3000 i5+ exposure systems for many GaAs IC technologies that use FETs as well as Bipolar transistors. PCB ASS'Y, CAM UNIT. Size 4” thru 8” SEMI Standard, JEIDA, Notch / Flat. FPA 3000 I4, I5 Brand new Y60-1010-000 PLANE PARALLEL PLATE UNIT. - Model FPA-3000i4 - Description Fine Pattern Aligner - FPA-3000i4 Configuration -. Comments. Material Quartz. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5 Stepper ; CANON FPA-3000 i5+ Stepper; CANON FPA-3000. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. Related Equipment For Sale. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. CANON FPA 3000 i5 is a precision wafer stepper designed for high-performance lithography and advanced microfabrication. ・従来機種（FPA-3030i5+）と比べ生産性が約17％向上（8inchウエハ条件において）. 00. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper;. CANON FPA 3000 i5+ is a high-precision, automated production-level wafer stepper designed for advanced semiconductor fabrication applications, featuring an imaging unit for 0. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepperComments Related Equipment For Sale. CANON FPA-3000 EX5 DUV Stepper For Sale Configuration: Wafer size: 4" / 6" / 8" (customer may specify per their requirement) Reticle size: 6" Square Field Size: 22 X 22. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper;. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold EquipmentCANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. Resolution : 0. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5 Stepper ; CANON FPA-3000 i5+ Stepper; CANON FPA. " We do not have the ability to test all equipment. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepperHe-Ne Laser (633 nm) Broad Band (Halogen lamp) Alignment Accuracy: < 0. It features an intuitive graphical interface, adjustable exposure settings, and low maintenance cost, making it an ideal tool for photomask patterning, sub-resolution lithography, and semiconductor. We are also offering TEL ACT 8, Single Block, DUV, Coater/Developer from our stock. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. 05. bg4-9250-000 . CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper;. 610-04 i5 Standard Test Reticle: BG3-4062-000: Laser Head Unit: BG4-3329-000: Ring Chuck:. 5BL (SG 24786) Console: HP 715 X-terminal Aut. CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. ASE Semiconductor. Alternate Part# BG8-2253. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepperCANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. 2022) Operating environment: Web application system using server client system: Server configuration:The FPA-5550iX utilizes the same projection lens used by its predecessor model, the FPA-5510iX (released in September 2015) which enables a high resolution of 0. Pellicle Frame Pattern Side Only. CDIF2 PCB. Find many great new & used options and get the best deals for Unix workstation controller Canon Stepper FPA-3000 i4 i5 i5+ EX3 EX4 EX5 EX6 iW at the best online prices at eBay! Free shipping for many products!CANON FPA 3000 i5+ is a state-of-the-art lithography system designed to meet the needs of the most demanding semiconductor manufacturers with its high-NA lens for maximum resolution and throughput while offering a 5. CANON 機台零件服務. ・50mm（2inch）～ 200mm（8inch）の幅広いウエハーサイズ対応. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper;. 多様な半導体デバイス製造とCoO（Cost of. or Best Offer. Recently Sold Equipment. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. Canon Fujitsu Denso 4250-E921 Hi-Voltage power supply for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 Canon Fujitsu Denso 4250-E921 . CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. Past technologies involved minimal wafer topography, and thus focus issues were not prevalent. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepperCANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. $650. Same as alternate Part#s BG8-2252 BH8-0670-04 . CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5 Stepper ; CANON FPA-3000. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. It offers enhanced capabilities and automation for users and is ideal for cost-effective production. CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. Includes: (1) CANON FPA-3000 iW Fine Pattern Aligner. ASE Semiconductor Status. FPA-5550iZ2 Steppers also support growing demand for Internet-of-Things (IoT) device fabrication on both 200 and 300 mm wafers. Quantity: 0. ・広画角の露光が可能でありながら1. Reticle: 1. 35µm resolution and 100wph on 200mm wafers. Size 6" square t=0. Alternate Part No : BG4-4433-U00. Canon Stepper FPA-3000 iW Stepper. Pellicle Frame Pattern Side Only : Wafer: 1. 10000 + Accumulated Sales Volume. 3 Used Canon FPA3000 Wafer Steppers in South Korea. CANON. Field Size 22x22 17x26. 2004: Quantity: 1: Sales Condition:. CANON BG4-6973-000 - AC/DC Power Supply (E-Box) CANON BG4-9150-000 - BACK PLANE PCB (VME) CANON BG4-6626-000 - MAIN CPU PCB ASS'Y; CANON BG4-6629-000 - XY STAGE CPU PCB ASS'Y; CANON BY9-9199-000 - Tilt Stage Adjustment Tool ; CANON BY9-9200-000 - Tilt Stage. Work included troubleshooting of complex. It is an ideal solution for. $ 20 M + Sales Revenue. Canon manufactured i-line steppers (FPA-3000i4, i5, i5+) and KrF steppers (FPA-3000EX4, EX5, EX6) in the 1990s that were widely used in 8-inch System on Chip (SoC) and DRAM production lines. 6" No. This service offering includes: Scheduled PM service; Emergency tool down service; Stepper relocation;CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. Suitable for Canon FPA-3000 i5 steppers Brand new Magnets and Air Pads . Canon FPA-6000 ES6a Details. Comments. 5D and 3D technology. Related Equipment For Sale. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepperCANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. 06. CANON. 99 to $15. Light Source: 2. 25" 2. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. CANON FPA-2500 i3 Stepper; CANON FPA-3000 EX3 DUV Stepper; CANON FPA-3000 EX4 DUV Stepper; CANON FPA-3000 EX6 DUV Stepper; CANON FPA-3000 i5 Stepper; CANON FPA-3000 i5. Item id:108968, model FPA3000 EX3/ i5 (Spares) manufactured by Canon. Canon item numbers Nikon item numbers ASML item numbers Ultratech item numbers. CANON FPA-3000 EX5 DUV Stepper; CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; Recently Sold Equipment. 装置名：FPA-5550iZ2. Achieves 0. com is pleased to announce the availability of the following listed used Canon Fujitsu Denso 4247-E924 1ch power supply module for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6. Its wide-field lens with improved NA variability makes it an excellent investment. NEW OSRAM HBO 2002 W/MA 2000W MICROLITHOGRAPHY LAMP CANON 500/600/1500 STEPPER. CANON FPA 3000 i5+ wafer stepper is an advanced step and repeat equipment produced by CANON for high-end lithography operations. Comments. quote. Same as alternate part#s BG8-2253 BH8-0671-05. CANON FPA-3000 i4 Stepper; CANON Y60-1095-R00 XY stage, i5 stepper; This product is located at our USA - East Coast HQ facility. 15 micron feature resolution, 6-layer film processing, high throughput, and built-in control and automation capabilities for reduced production time and improved accuracy.